CMOS-Integrated Aluminum Nitride MEMS: A Review

Journal of Microelectromechanical Systems

2022 | journal-article

Flexible ferroelectret for zero power wearable application

FLEPS 2022 - IEEE International Conference on Flexible and Printable Sensors and Systems, Proceedings

2022 | conference-paper

Lead free 0.9Na_1/2Bi_1/2TiO₃-0.1BaZr_0.2Ti_0.8O₃thin film with large piezoelectric electrostrain

Applied Physics Letters

2022 | journal-article

Pyroelectrically Rechargeable Electret for Continuous Vibration Energy Harvester

21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

2021 | conference-paper

Surface Texture Detection With a New Sub-mm Resolution Flexible Tactile Capacitive Sensor Array for Multimodal Artificial Finger

Journal of Microelectromechanical Systems

2020 | journal-article

Design Optimization of a Lorentz Force, Amplitude Modulated, MEMS Space Magnetometer

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2020 | conference-paper

Fabrication and characterization of thin-film silicon resonators on 10 μm-thick polyimide substrates

Journal of Micromechanics and Microengineering

2020 | journal-article

Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined with Grayscale Lithography

Journal of Microelectromechanical Systems

2020 | journal-article

Highly sensitive MEMS frequency modulated accelerometer with small footprint

Sensors and Actuators, A: Physical

2020 | journal-article

Influence of Mechanical Stress in a Packaged Frequency-Modulated MEMS Accelerometer

INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

2020 | conference-paper

Hybrid Rigid-Flexible Magnetoresistive Device Based on a Wafer Level Packaging Technology for Micrometric Proximity Measurements

IEEE Sensors Journal

2019 | journal-article

Thin-Film Silicon Resonators on Ultra-Flexible 10 Micrometer-Thick Polyimide Substrates

2019 | conference-paper

Sub-Micron Mems Accelerometer with Handle-Layer Patterning for Damping Enhancement Using Time Transduction

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

2019 | conference-paper

Novel magnetic readout for hybrid spintronic MEMS devices

TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

2017 | conference-paper

Bi-directional extended range parallel plate electrostatic actuator based on feedback linearization

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2015 | conference-paper

High-Resolution MEMS Inclinometer Based on Pull-In Voltage

Journal of Microelectromechanical Systems

2015 | journal-article

High-performance pull-in time accelerometer

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

2015 | conference-paper

Real-Time Operation and Characterization of a High-Performance Time-Based Accelerometer

Journal of Microelectromechanical Systems

2015 | journal-article

Full-gap tracking system for parallel-plate electrostatic microactuatores

Procedia Engineering

2014 | conference-paper

Gas viscosity sensing based on the electrostatic pull-in time of microactuators

Sensors and Actuators, A: Physical

2014 | journal-article

Improving capacitance/damping ratio in a capacitive MEMS transducer

Journal of Micromechanics and Microengineering

2014 | journal-article

Thermal compensated pull-in voltage MEMS inclinometers

Procedia Engineering

2014 | conference-paper

FPGA controlled MEMS inclinometer

IEEE International Symposium on Industrial Electronics

2013 | conference-paper

Gas viscosity MEMS sensor based on pull-in

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

2013 | conference-paper

High resolution pull-in inclinometer

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

2013 | conference-paper

Autonomous MEMS inclinometer

Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)

2012 | conference-paper

Closed-loop operated time-based accelerometer

26th European Conference on Solid-State Transducers, Eurosensor 2012

2012 | journal-article

Pull-in MEMS Inclinometer

26th European Conference on Solid-State Transducers, Eurosensor 2012

2012 | journal-article

Static and Dynamic Modeling of a 3-Axis Thermal Accelerometer

26th European Conference on Solid-State Transducers, Eurosensor 2012

2012 | journal-article

A novel soi-mems "micro-swing" time-accelerometer operating in two time-based transduction modes for high sensitivity and extended range

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

2011 | conference-paper

Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage

Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems

2011 | journal-article

Design of a Time-Based Micro-g Accelerometer

Ieee Sensors Journal

2011 | journal-article

Pull-in-based mu g-resolution accelerometer: Characterization and noise analysis

Sensors and Actuators a-Physical

2011 | journal-article

Sensitivity linearization technique for a time based MEMS accelerometer

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

2011 | conference-paper

Squeeze-film damper design with air channels: experimental verification

Eurosensors Xxv

2011 | journal-article

Characterization of a pull-in based mu g-resolution accelerometer

Eurosensors Xxiv Conference

2010 | journal-article

Time-based micro-g accelerometer with improved damper geometry

2010 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2010 - Proceedings

2010 | conference-paper

X-Ray Image Detector Based on Light Guides and Scintillators

Ieee Sensors Journal

2009 | journal-article

X-ray cmos detector array with scintillating light guides

Proceedings of IEEE Sensors

2008 | conference-paper

CMOS optical sensors for being incorporated in endoscopic capsule for cancer cells detection

2007 Ieee International Symposium on Industrial Electronics, Proceedings, Vols 1-8

2007 | journal-article

On-chip integrated optical sensors for fluorescence detection of cancer tissue: Application to capsule endoscopy

2007 14th Ieee International Conference on Electronics, Circuits and Systems, Vols 1-4

2007 | book-chapter