Silicon selective etching by gold implantation: Feasibility and nanofabrication capabilities

Micro and Nano Engineering

2025 | journal-article

Optical absorption driven by efficient refraction and light concentration for photovoltaic applications

Solar Energy Materials and Solar Cells

2024 | journal-article

Periodic Arrays of Dopants in Silicon by Ultralow Energy Implantation of Phosphorus Ions through a Block Copolymer Thin Film

ACS Applied Materials & Interfaces

2023 | journal-article

Technology Development for Exploring Novel Concepts in Semiconductor Qubits

2023 14th Spanish Conference on Electron Devices (CDE)

2023 | conference-paper

Suspended Nanochannel Resonators Made by Nanoimprint and Gas Phase Deposition

2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)

2023 | conference-paper

Three-level hierarchical micro/nanostructures on biopolymers by injection moulding using low-cost polymeric inlays

The International Journal of Advanced Manufacturing Technology

2023 | journal-article

Anti-reflective and superamphiphilic coatings on polycarbonate

Optical Materials

2022 | journal-article

Incorporation of nano-features into surface photoactive arrays for broadband absorption of the solar radiation

Solar Energy Materials and Solar Cells

2022 | journal-article

Photocurrent Enhancement with Arrays of Silicon Light Nanotowers for Photovoltaic Applications

ACS Applied Nano Materials

2022 | journal-article

Broadband and Omnidirectional Antireflection Surfaces Based on Deep Subwavelength Features for Harvesting of the Solar Energy

Solar RRL

2021 | journal-article

Near‐Field Optical Excitations in Silicon Subwavelength Light Funnel Arrays for Broadband Absorption of the Solar Radiation

Solar RRL

2021 | journal-article

Multi-Frequency Resonance Behaviour of a Si Fractal NEMS Resonator

Nanomaterials

2020 | journal-article

An efficient and deterministic photon management using deep subwavelength features

Nano Energy

2020 | journal-article

Opportunities for enhanced omnidirectional broadband absorption of the solar radiation using deep subwavelength structures

Nano Energy

2020 | journal-article

Automated characterisation and analysis of large arrays of nanostructures fabricated at wafer scale

Precision Engineering

2019 | journal-article

Creative Approaches on Interactive Visualization and Characterization at the Nanoscale

2019 | book-chapter

Study of buckling behavior at the nanoscale through capillary adhesion force

Applied Physics Letters

2018 | journal-article

Arrays of suspended silicon nanowires defined by ion beam implantation: mechanical coupling and combination with CMOS technology

Nanotechnology

2018 | journal-article

Efficient light trapping and broadband absorption of the solar spectrum in nanopillar arrays decorated with deep-subwavelength sidewall features

Nanoscale

2018 | journal-article

Multi-frequency silicon nanofractal resonator

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2018 | conference-paper

A statistical analysis of nanocavities replication applied to injection moulding

International Communications in Heat and Mass Transfer

2017 | journal-article

Evaluating the compressive stress generated during fabrication of Si doubly clamped nanobeams with AFM

Journal of Vacuum Science & Technology B

2016 | journal-article

Erratum: Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution (Nanotechnology (2015) 26 (145502))

Nanotechnology

2015 | journal-article

Fabrication of functional electromechanical nanowire resonators by focused ion beam (FIB) implantation

Alternative Lithographic Technologies Vii

2015 | book-chapter

Fabrication of functional electromechanical nanowire resonators by focused ion beam implantation

Journal of Micro-Nanolithography Mems and Moems

2015 | journal-article

Laser Fabrication of Polymer Ferroelectric Nanostructures for Nonvolatile Organic Memory Devices

Acs Applied Materials & Interfaces

2015 | journal-article

Manipulation of competing ferromagnetic and antiferromagnetic domains in exchange-biased nanostructures

Physical Review B

2015 | journal-article

Resonant tunnelling features in a suspended silicon nanowire single-hole transistor

Applied Physics Letters

2015 | journal-article

Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution

Nanotechnology

2015 | journal-article

Tuning piezoresistive transduction in nanomechanical resonators by geometrical asymmetries

Applied Physics Letters

2015 | journal-article

Enabling electromechanical transduction in silicon nanowire mechanical resonators fabricated by focused ion beam implantation

Nanotechnology

2014 | journal-article

High-sensitivity linear piezoresistive transduction for nanomechanical beam resonators

Nature Communications

2014 | journal-article

In-plane thermal conductivity of sub-20 nm thick suspended mono- crystalline Si layers

Nanotechnology

2014 | journal-article

Analysis of the AlGaN/GaN vertical bulk current on Si, sapphire, and free-standing GaN substrates

Journal of Applied Physics

2013 | journal-article

Dual function polyvinyl alcohol based oxide precursors for nanoimprinting and electron beam lithography

Materials Research Society Symposium Proceedings

2013 | conference-paper

Functional oxide nanostructures written by EBL on insulating single crystal substrates

Microelectronic Engineering

2013 | journal-article

Inhibiting the absorber/Mo-back contact decomposition reaction in Cu2ZnSnSe4 solar cells: the role of a ZnO intermediate nanolayer

Journal of Materials Chemistry a

2013 | journal-article

Gate current analysis of AlGaN/GaN on silicon heterojunction transistors at the nanoscale

Applied Physics Letters

2012 | journal-article

Nanoscale investigation of AlGaN/GaN-on-Si high electron mobility transistors

Nanotechnology

2012 | journal-article

Post-CMOS integration of nanomechanical devices by direct ion beam irradiation of silicon

Materials Research Society Symposium Proceedings

2012 | conference-paper

Characterisation of HfO2/Si/SiC MOS Capacitors

Materials Science Forum

2011 | book

Characterization of HfO2/Si/SiC MOS Capacitors

Materials Science Forum

2011 | journal-article

Fabrication Of Nanomechanical Devices Integrated In CMOS Circuits By Ion Beam Exposure Of Silicon

Application of Accelerators in Research and Industry: Twenty-First International Conference

2011 | journal-article

Micro and nano analysis of 0.2 Omega mm Ti/Al/Ni/Au ohmic contact to AlGaN/GaN

Applied Physics Letters

2011 | journal-article

Nanomagnets with high shape anisotropy and strong crystalline anisotropy: perspectives on magnetic force microscopy

Nanotechnology

2011 | journal-article

Integration of HfO2 on Si/SiC heterojunctions for the gate architecture of SiC power devices

Applied Physics Letters

2010 | journal-article

Electron- and ion-beam lithography for the fabrication of nanomechanical devices integrated on CMOS circuits

Microelectronic Engineering

2009 | journal-article

Fabrication of complementary metal-oxide-semiconductor integrated nanomechanical devices by ion beam patterning

Journal of Vacuum Science & Technology B

2009 | journal-article

Nanomagnet fabrication on FBAR for magnetic sensor applications

Proceedings - IEEE Ultrasonics Symposium

2009 | conference-paper

Nanomagnet fabrication on FBAR for magnetic sensor applications

IEEE International Ultrasonic Symposium Proceedings

2009 | journal-article

Si/SiC bonded wafer: A route to carbon free SiO2 on SiC

Applied Physics Letters

2009 | journal-article

Using electron and ion beams on carbon nanotube-based devices. Effects and considerations for nanofabrication

Microelectronic Engineering

2009 | journal-article

Mass measurements based on nanomechanical devices: differential measurements

Proceedings of the 17th International Vacuum Congress/13th International Conference on Surface Science/international Conference on Nanoscience and Technology

2008 | journal-article