Algoritmi | User | João Carlos Azevedo Gaspar
João Carlos Azevedo Gaspar
João Carlos Azevedo Gaspar
At LASI
Integrated Researcher with PhD
Member of the CALG R&D Unit
Academic Degree
PhD
Current Position
Other at Outra
Personal Webpage
Personal Email
joao.gaspar@inl.intOrcid
0000-0002-6358-8951Researcher ID
FCT Public Key
J561458qqAYu
Ciência ID
Google Scholar
About Me
João Gaspar is a Principal Investigator at the International Iberian Nanotechnology Laboratory (INL), Braga, where he leads the group of MEMS and Microenergy Harvesting Devices. He is also INL coordinator for nanofabrication and processes. His research activities include microfabrication processes and advanced silicon micromachining, high-throughput wafer-scale testing and reliability of MEMS/semiconductor materials and devices, hybrid structures combining MEMS with other technologies, resonance and optical applications, functional flexible devices, resonant microenergy scavengers, and microneedles and capillary arrays for biomedical applications and related post-CMOS processing. He has participated in several major competitive research projects funded by EU, national and regional sources (e.g. partner in EU FP7 “Enhanced power pilot line – EPPL” project, partner in FCT project ”Construction of a chip-scale SERF-type atomic magnetometer”, coordinator of ON2 research line “Integrated hybrid microsystems and nanodevices”). He also leads several industrial collaborations involving cleanroom processes between INL and companies such as Nanium, Bosch, Lusospace, microLIQUID and AWSensors. João Gaspar has published 46 peer-reviewed papers and over 100 proceedings, with his work having been presented in about 132 conferences. He has been recently invited to an Auxiliar Professor appointment at Instituto Superior Técnico, Lisbon, position he will accumulate with his responsibilities at INL. Relevant publications: • M. Costa, J. Gaspar, R. Ferreira, E. Paz, H. Fonseca, M. Martins, S. Cardoso, and P. P. Freitas, “Integration of magnetoresistive sensors with atomic force microscopy cantilevers for scanning magnetoresistance microscopy applications,” IEEE Trans. Magnetics, DOI 10.1109/TMAG.2015.2448612, 2015. • C. S. Silva, J. Noh, H. Fonseca, A. Pontes, J. Gaspar, and L. A. Rocha, “Fabrication and characterization of polymeric 3-axis thermal accelerometer,” J. Micromech. Microeng., vol. 25, no. 8, 085005 (13pp), Jul. 2015. • F. S. Alves, R. A. Dias, J. Cabral, J. Gaspar, and L. A. Rocha, “High-resolution MEMS inclinometer based on pull-in voltage,” IEEE J. Microlectromech. Syst., vol. PP, no. 99, DOI: 10.1109/JMEMS.2014.2359633, 2014. • F. A. Cardoso, T. Costa, J. Germano, S. Cardoso, J. Borme, J. Gaspar, J. R. Fernandes, M. S. Piedade, and P. P. Freitas, “Integration of magnetoresistive biochips on a CMOS circuit,” IEEE Trans. Magnetics, vol. 48, no. 11, pp. 3784-3787, Nov. 2012. • U. Bartsch, J. Gaspar, and O. Paul, “Low-frequency two-dimensional resonators for vibrational micro energy harvesting,” J. Micromech. Microeng., vol. 20, no. 3, 035016 (12pp), Mar. 2010. Recent Funding: - Construction of a chip-scale SERF-type atomic magnetometer, FCT funded project PTDC/FIS/122689/2010, total funding of 115 k€, no funding for INL, Feb. 2012-Feb. 2015, role as partner - Integrated hybrid microsystems and nanodevices (research line within microsystems and nanodevices topic), ON2 call SAESCTN-PIIC&DT/1/2011, funding for INL on this specific project of 751 k€, for a period of 30 months, Jan. 2013-Jun. 2015, role as coordinator - Enhanced power pilot line (EPPL), EU FP7 funded project, call ENIAC-2012-2, funding scheme JTI-CP-ENIAC, proposal number 325608-2, total funding of 11327 k€, funding of 87 k€ (583.2 k€) for INL, for a period of 36 months, Apr. 2013-Mar. 2016, role as partner
Publications (163)
Hybrid Multisite Silicon Neural Probe with Integrated Flexible Connector for Interchangeable Packaging
Sensors
2021 | journal-article
Hybrid multisite silicon neural probe with integrated flexible connector for interchangeable packaging
2021 | other
High-Performance and Industrially Viable Nanostructured SiO
Solar RRL
2021 | journal-article
Double-layer flexible neuronal probe with closely spaced electrodes for high-densityin-vivobrain recordings
2020 | preprint
A Smart Dental Prosthesis to Restore Dental Proprioceptivity
2020 35th Conference on Design of Circuits and Integrated Systems, DCIS 2020
2020 | conference-paper
An Active Implant to Restore Dental Proprioceptivity
Proceedings - Euromicro Conference on Digital System Design, DSD 2020
2020 | conference-paper
An Alternative Approach to Investigate V-Shaped Electrothermal Microactuators in Vacuum
Journal of Microelectromechanical Systems
2020 | journal-article
An efficient and deterministic photon management using deep subwavelength features
Nano Energy
2020 | journal-article
Design Optimization of a Lorentz Force, Amplitude Modulated, MEMS Space Magnetometer
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2020 | conference-paper
Dissolving microneedles for the delivery of peptides – Towards tolerance-inducing vaccines
International Journal of Pharmaceutics
2020 | journal-article
Efficient light extraction in subwavelength GaAs/AlGaAs nanopillars for nanoscale light-emitting devices
Optics Express
2020 | journal-article
Engineering of 2D transition metal carbides and nitrides MXenes for cancer therapeutics and diagnostics
Journal of Materials Chemistry B
2020 | journal-article
Erratum to: Conformal and continuous deposition of bifunctional cobalt phosphide layers on p-silicon nanowire arrays for improved solar hydrogen evolution (Nano Research, (2018), 11, 9, (4823-4835), 10.1007/s12274-018-2070-4)
Nano Research
2020 | journal-article
Fabrication and characterization of thin-film silicon resonators on 10 μm-thick polyimide substrates
Journal of Micromechanics and Microengineering
2020 | journal-article
Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined with Grayscale Lithography
Journal of Microelectromechanical Systems
2020 | journal-article
Facile synthesis and defect optimization of 2D-layered MoS
Scientific Reports
2020 | journal-article
Field-effect transistors made of graphene grown on recycled copper foils
Materials Chemistry and Physics
2020 | journal-article
Highly sensitive MEMS frequency modulated accelerometer with small footprint
Sensors and Actuators, A: Physical
2020 | journal-article
Industry 4.0: Real-time monitoring of an injection molding tool for smart predictive maintenance
IEEE International Conference on Emerging Technologies and Factory Automation, ETFA
2020 | conference-paper
Influence of Mechanical Stress in a Packaged Frequency-Modulated MEMS Accelerometer
INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
2020 | conference-paper
Opportunities for enhanced omnidirectional broadband absorption of the solar radiation using deep subwavelength structures
Nano Energy
2020 | journal-article
Organ-on-a-Chip: A Preclinical Microfluidic Platform for the Progress of Nanomedicine
Small
2020 | journal-article
Small-size MEMS Accelerometer Encapsulated in Vacuum Using Sigma-Delta Modulation
INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
2020 | conference-paper
Surface Texture Detection with a New Sub-mm Resolution Flexible Tactile Capacitive Sensor Array for Multimodal Artificial Finger
Journal of Microelectromechanical Systems
2020 | journal-article
A Perspective on Microneedle-Based Drug Delivery and Diagnostics in Paediatrics
Journal of Personalized Medicine
2019 | journal-article
Manipulation of Magnetic Beads with Thin Film Microelectromagnet Traps
Micromachines
2019 | journal-article
A morphological and electronic study of ultrathin rear passivated Cu(In,Ga)Se
Thin Solid Films
2019 | journal-article
Automated characterisation and analysis of large arrays of nanostructures fabricated at wafer scale
Precision Engineering
2019 | journal-article
Creative Approaches on Interactive Visualization and Characterization at the Nanoscale
2019 | book-chapter
Fast and efficient microfluidic cell filter for isolation of circulating tumor cells from unprocessed whole blood of colorectal cancer patients
Scientific Reports
2019 | journal-article
Fatigue lifetime prediction of arbitrarily-shaped MEMS structures made of polysilicon thin films
Microsystem Technologies
2019 | journal-article
Hybrid Rigid-Flexible Magnetoresistive Device Based on a Wafer Level Packaging Technology for Micrometric Proximity Measurements
IEEE Sensors Journal
2019 | journal-article
Small Size and Highly Sensitive Differential MEMS Accelerometer Based on Double-Ended Tuning Fork Resonators
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
2019 | conference-paper
Strong enhancement of light extraction efficiency in sub-wavelength AlGaAs/GaAs vertical-emitting nanopillars
Optics InfoBase Conference Papers
2019 | conference-paper
Strong enhancement of light extraction efficiency in sub-wavelength AlGaAs/GaAs vertical-emitting nanopillars
2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019
2019 | conference-paper
Sub-Micron Mems Accelerometer with Handle-Layer Patterning for Damping Enhancement Using Time Transduction
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
2019 | conference-paper
Thin-Film Silicon Resonators on Ultra-Flexible 10 Micrometer-Thick Polyimide Substrates
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
2019 | conference-paper
Resonant Accelerometer based on Double-Ended Tuning Fork and a Force Amplification Mechanism
2018 | conference-paper
Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork Resonator
Proceedings
2018 | journal-article
High Frequency FM MEMS Accelerometer Using Piezoresistive Resonators
Proceedings
2018 | journal-article
SU-8 Based Waveguide for Optrodes
Proceedings
2018 | journal-article
High-Resolution Seismocardiogram Acquisition and Analysis System
Sensors
2018 | journal-article
3D Magnetic Field Reconstruction Methodology Based on a Scanning Magnetoresistive Probe
Sensors
2018 | journal-article
Conformal and continuous deposition of bifunctional cobalt phosphide layers on p-silicon nanowire arrays for improved solar hydrogen evolution
Nano Research
2018 | journal-article
Digital platform for Sigma-Delta accelerometer assessment and test
Microsystem Technologies
2018 | journal-article
Efficient light trapping and broadband absorption of the solar spectrum in nanopillar arrays decorated with deep-subwavelength sidewall features
Nanoscale
2018 | journal-article
Highly efficient DNA extraction and purification from olive oil on a washable and reusable miniaturized device
Analytica Chimica Acta
2018 | journal-article
Highly-ordered silicon nanowire arrays for photoelectrochemical hydrogen evolution: An investigation on the effect of wire diameter, length and inter-wire spacing
Sustainable Energy and Fuels
2018 | journal-article
Insulator Materials for Interface Passivation of Cu(In,Ga)Se
IEEE Journal of Photovoltaics
2018 | journal-article
Ultra-small packaged micro-cooler for medical applications
2017 IEEE 19th Electronics Packaging Technology Conference, EPTC 2017
2018 | conference-paper
Challenges and trends in magnetic sensor integration with microfluidics for biomedical applications
Journal of Physics D: Applied Physics
2017 | journal-article
Flexible Magnetoresistive Sensors Designed for Conformal Integration
IEEE Transactions on Magnetics
2017 | journal-article
Microneedles with integrated magnetoresistive sensors: A precision tool in biomedical instrumentation
SAS 2017 - 2017 IEEE Sensors Applications Symposium, Proceedings
2017 | conference-paper
Novel magnetic readout for hybrid spintronic MEMS devices
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
2017 | conference-paper
On-Chip Magnetic Nanoparticle Manipulation and Trapping for Biomedical Applications
IEEE Transactions on Magnetics
2017 | journal-article
Towards high-resolution scanning magnetoresistance microscopy
2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
2017 | conference-paper
Ultra-Low Temperature FOWLP Process for the Embedding of Low Thermal Budget Sensors and Components Using SU-8 as Dielectric
Proceedings - Electronic Components and Technology Conference
2017 | conference-paper
Hybrid Integration of Magnetoresistive Sensors with MEMS as a Strategy to Detect Ultra-Low Magnetic Fields
Micromachines
2016 | journal-article
Analysis and Characterization of Thermal-Piezoresistive MEMS Resonators
Procedia Engineering
2016 | conference-paper
Digital platform for wafer-level MEMS testing and characterization using electrical response
Sensors (Switzerland)
2016 | journal-article
Embedded Platform for Generic High-order Sigma-delta Accelerometers Testing
Procedia Engineering
2016 | conference-paper
Full-gap tracking system for parallel plate electrostatic actuators using closed-loop control
Sensors and Actuators, A: Physical
2016 | journal-article
Implementing a strategy for on-chip detection of cell-free DNA fragments using GMR sensors: A translational application in cancer diagnostics using ALU elements
Analytical Methods
2016 | journal-article
Low-voltage, High-tuning Range MEMS Variable Capacitor Using Closed-loop Control
Procedia Engineering
2016 | conference-paper
Performance Comparison of Sigma-delta Modulator Architectures for MEMS Accelerometers Using a Fully-Digital Approach
Procedia Engineering
2016 | conference-paper
Amorphous oxygen-rich molybdenum oxysulfide Decorated p-type silicon microwire Arrays for efficient photoelectrochemical water reduction
Nano Energy
2015 | journal-article
Bending Effect on Magnetoresistive Silicon Probes
IEEE Transactions on Magnetics
2015 | journal-article
Bending effect on magnetoresistive silicon probes
2015 IEEE International Magnetics Conference, INTERMAG 2015
2015 | conference-paper
Bi-directional extended range parallel plate electrostatic actuator based on feedback linearization
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2015 | conference-paper
Design, fabrication and test of an integrated multi-microchannel heat sink for electronics cooling
Sensors and Actuators, A: Physical
2015 | journal-article
Embedded MEMS platform for structure test and characterization
Procedia Engineering
2015 | conference-paper
Fabrication and characterization of polymeric three-axis thermal accelerometers
Journal of Micromechanics and Microengineering
2015 | journal-article
Fabrication and mechanical characterization of flexible devices with sensors with magnetoresistance responses above 150%
2015 IEEE International Magnetics Conference, INTERMAG 2015
2015 | conference-paper
High-Resolution MEMS Inclinometer Based on Pull-In Voltage
Journal of Microelectromechanical Systems
2015 | journal-article
High-performance pull-in time accelerometer
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
2015 | conference-paper
Integration of Magnetoresistive Sensors with Atomic Force Microscopy Cantilevers for Scanning Magnetoresistance Microscopy Applications
IEEE Transactions on Magnetics
2015 | journal-article
Integration of magnetoresistive sensors with atomic force microscopy cantilevers for scanning magnetoresistance microscopy applications
2015 IEEE International Magnetics Conference, INTERMAG 2015
2015 | conference-paper
Real-Time Operation and Characterization of a High-Performance Time-Based Accelerometer
Journal of Microelectromechanical Systems
2015 | journal-article
Sub-micron gap in-plane micromechanical resonators based on low-temperature amorphous silicon thin-films on glass substrates
Journal of Micromechanics and Microengineering
2015 | journal-article
Full-gap tracking system for parallel-plate electrostatic microactuatores
Procedia Engineering
2014 | conference-paper
Piezoresistor sensor fabrication by direct laser writing on hydrogenated amorphous silicon
Journal of Management and Organization
2014 | journal-article
The use of polymeric technologies for functional 3D Microdevices
Procedia Engineering
2014 | conference-paper
Thermal compensated pull-in voltage MEMS inclinometers
Procedia Engineering
2014 | conference-paper
A fully integrated three-axis thermal accelerometer
Conference Record - IEEE Instrumentation and Measurement Technology Conference
2013 | conference-paper
A prediction scheme of the static fracture strength of MEMS structures based on the characterization of damage distribution on a processed surface
Journal of Micromechanics and Microengineering
2013 | journal-article
High resolution pull-in inclinometer
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
2013 | conference-paper
Integration of TMR sensors in silicon microneedles for magnetic measurements of neurons
IEEE Transactions on Magnetics
2013 | journal-article
Measuring brain activity with magnetoresistive sensors integrated in micromachined probe needles
Applied Physics A: Materials Science and Processing
2013 | journal-article
Sub-micron gap a-Si:H thin film Lamé-mode resonator processed at low temperature on a glass substrate
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
2013 | conference-paper
The effect of eccentricity in the position of UO
Progress in Nuclear Energy
2013 | journal-article
FIB preparation and SEM investigations for three-dimensional analysis of cell cultures on microneedle arrays
Scanning
2012 | journal-article
Identification of fatigue crack extension process in zero-tension cyclic stress test of polysilicon films
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2012 | conference-paper
Integration of magnetoresistive biochips on a CMOS circuit
IEEE Transactions on Magnetics
2012 | journal-article
Mechanical and piezoresistive properties of thin silicon films deposited by plasma-enhanced chemical vapor deposition and hot-wire chemical vapor deposition at low substrate temperatures
Journal of Applied Physics
2012 | journal-article
Micro-fabricated channel with ultra-thin yet ultra-strong windows enables electron microscopy under 4-bar pressure
Applied Physics Letters
2012 | journal-article
Statistical characterization of fatigue lifetime of polysilicon thin films
Sensors and Actuators, A: Physical
2012 | journal-article
Effect of humidity and temperature on the fatigue behavior of polysilicon thin film
Sensors and Actuators, A: Physical
2011 | journal-article
Estimation of the parameters determining strength and fatigue behaviors of arbitrarily-shaped polysilicon thin films
ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems, InterPACK 2011
2011 | conference-paper
Finite fatigue lifetime of silicon under inert environment
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2011 | conference-paper
Measurement of nanomicro out-of-plane and in-plane displacements of micromechanical components by using digital holography and speckle interferometry
Optical Engineering
2011 | journal-article
Nonlinear piezoresistance of silicon at large stresses
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2011 | conference-paper
Study of the piezoresistivity of doped nanocrystalline silicon thin films
Journal of Applied Physics
2011 | journal-article
A novel fatigue test with ramping stress amplitude to evaluate fatigue behavior of polysilicon thin films
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2010 | conference-paper
A study of prediction of static fracture strength of MEMS structure for strength design scheme
Procedia Engineering
2010 | conference-paper
Accuracy of the fatigue lifetime of polysilicon predicted from its strength distribution
Materials Research Society Symposium Proceedings
2010 | conference-paper
Characterization of ultrathin membranes to enable TEM observation of gas reactions at high pressures
ASME International Mechanical Engineering Congress and Exposition, Proceedings
2010 | conference-paper
Design of experiment characterization of microneedle fabrication processes based on dry silicon etching
Journal of Micromechanics and Microengineering
2010 | journal-article
Development of reference standards for the calibration of optical systems used in the measurement of microcomponents
Strain
2010 | journal-article
Low-frequency two-dimensional resonators for vibrational micro energy harvesting
Journal of Micromechanics and Microengineering
2010 | journal-article
Mechanical properties of thin silicon films deposited at low temperatures by PECVD
Journal of Micromechanics and Microengineering
2010 | journal-article
Nonlinear piezoresistance of silicon
Proceedings of IEEE Sensors
2010 | conference-paper
Out-of-plane electrostatic microactuators with tunable stiffness
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2010 | conference-paper
A 2D electret-based resonant micro energy harvester
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2009 | conference-paper
Calibration of optical systems for the measurement of microcomponents
Optics and Lasers in Engineering
2009 | journal-article
Development of calibration standards for the optical measurement of in-plane displacements of micromechanical components
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2009 | conference-paper
Evaluation of the mechanical properties of aluminum thin films as a function of strain rate using the wafer-scale microtensile technique
Materials Research Society Symposium Proceedings
2009 | conference-paper
Highly efficient extraction of mechanical and linear and quadratic piezoresistive properties of poly-Si films using wafer-scale microtensile testing
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2009 | conference-paper
Hollow microneedle electrode arrays for intracellular recording applications
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2009 | conference-paper
MEMS calibration standards for the optical measurement of displacements
Fringe 2009 - 6th International Workshop on Advanced Optical Metrology
2009 | conference-paper
Measurement of in-plane deformations of microsystems by digital holography and speckle interferometry
Chinese Optics Letters
2009 | journal-article
Mechanical characterization of CMOS metal layers
TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
2009 | conference-paper
Prediction of strength and fatigue lifetime of MEMS structures with arbitrary shapes
TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
2009 | conference-paper
Wafer-scale microtensile testing of thin films
Journal of Microelectromechanical Systems
2009 | journal-article
Characterization of the charging and long-term performance of cytop electret layers for MEMS applications
Materials Research Society Symposium Proceedings
2008 | conference-paper
Fracture properties of LPCVD silicon nitride and thermally grown silicon oxide thin films from the load-deflection of long Si
Journal of Microelectromechanical Systems
2008 | journal-article
High-throughput wafer-scale microtensile testing of thin films
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2008 | conference-paper
Intracellular potential measurements of adherently growing cells using micro-needle arrays
12th International Conference on Miniaturized Systems for Chemistry and Life Sciences - The Proceedings of MicroTAS 2008 Conference
2008 | conference-paper
Mechanical properties and reliability of amorphous vs. poly crystalline silicon thin films
Materials Research Society Symposium Proceedings
2008 | conference-paper
Microneedle arrays for intracellular recording applications
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2008 | conference-paper
Modeling and improvement of a metallization system subjected to fast temperature cycle stress
EuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems
2008 | conference-paper
Prediction of fatigue lifetime based on static strength and crack extension law - Fatigue test of MEMS materials becomes unnecessary
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2008 | conference-paper
Reliability of MEMS materials: Mechanical characterization of thin-films using the wafer scale bulge test and improved microtenslle techniques
Materials Research Society Symposium Proceedings
2008 | conference-paper
Seamless interpretation of the strength and fatigue lifetime of polycrystalline silicon thin films
Journal of Micromechanics and Microengineering
2008 | journal-article
Systematic characterization of DRIE-based fabrication process of silicon microneedles
Materials Research Society Symposium Proceedings
2008 | conference-paper
Advanced silicon microstructures, sensors, and systems
IEEJ Transactions on Electrical and Electronic Engineering
2007 | journal-article
Comparison of improved bulge and microtensile techniques for mechanical thin film characterization -application to polysilicon
TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
2007 | conference-paper
Electrostatic transducers for micro energy harvesting based on SOI technology
TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
2007 | conference-paper
Mechanical characterization of silicon nitride thin-films using microtensile specimens with integrated 2D diffraction gratings
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2007 | conference-paper
Mechanical characterization of thin-film composites using the load-deflection response of multilayer membranes - Elastic and fracture properties
Materials Research Society Symposium Proceedings
2006 | conference-paper
Electrostatic microresonators from doped hydrogenated amorphous and nanocrystalline silicon thin films
Journal of Microelectromechanical Systems
2005 | journal-article
Electrostatically actuated polymer microresonators
Applied Physics Letters
2005 | journal-article
Electrostatically actuated thin-film amorphous silicon microbridge resonators
Journal of Applied Physics
2005 | journal-article
Thin film silicon microbridges for DNA detection
Materials Research Society Symposium Proceedings
2005 | conference-paper
Thin-film paddle microresonators with high quality factors fabricated at temperatures below 110°C
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2005 | conference-paper
Amorphous silicon electrostatic microresonators with high quality factors
Applied Physics Letters
2004 | journal-article
High-Q thin-film silicon resonators processed at temperatures below 110°C on glass and plastic substrates
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2004 | conference-paper
MEMS microresonators based on nanocrystalline silicon
Materials Research Society Symposium Proceedings
2004 | conference-paper
Dissipation mechanisms in thin-film silicon microresonators on glass substrates
Materials Research Society Symposium - Proceedings
2003 | conference-paper
Electrostatic actuation of thin-film microelectromechanical structures
Journal of Applied Physics
2003 | journal-article
Integrated magnetic sensing of electrostatically actuated thin-film microbridges
Journal of Microelectromechanical Systems
2003 | journal-article
Low-temperature thin-film silicon MEMS
Thin Solid Films
2003 | journal-article
Performance of Thin-Film Silicon MEMS Resonators in Vacuum
Materials Research Society Symposium - Proceedings
2003 | conference-paper
Thin-film electrostatic actuators on flexible plastic substrates
Materials Research Society Symposium - Proceedings
2003 | conference-paper
Integrated magnetic sensing of electrostatically actuated thin-film microbridges
Materials Research Society Symposium - Proceedings
2002 | conference-paper
MEMS microbridge deflection monitoring using integrated spin valve sensors and micromagnets
Digests of the Intermag Conference
2002 | conference-paper
MEMS microbridge deflection monitoring using integrated spin valve sensors and micromagnets
INTERMAG Europe 2002 - IEEE International Magnetics Conference
2002 | conference-paper
MEMS microbridge vibration monitoring using spin-valve sensors
IEEE Transactions on Magnetics
2002 | journal-article
Microelectromechanical system microbridge deflection monitoring using integrated spin valve sensors and micromagnets
Journal of Applied Physics
2002 | journal-article
Thermal actuation of thin film microelectromechanical structures
Journal of Non-Crystalline Solids
2002 | journal-article
Thin film microelectromechanical systems
Materials Research Society Symposium - Proceedings
2002 | conference-paper
Amorphous and microcrystalline silicon deposited by hot-wire chemical vapor deposition at low substrate temperatures: Application to devices and thin-film microelectromechanical systems
Thin Solid Films
2001 | journal-article
Electromechanical properties of amorphous and microcrystalline silicon micromachined structures
Materials Research Society Symposium - Proceedings
2001 | conference-paper
Thin-film microelectromechanical devices on large-area substrates
Solid State Phenomena
2001 | book
Hybrid Multisite Silicon Neural Probe with Integrated Flexible Connector for Interchangeable Packaging
Sensors
2021 | journal-article
Hybrid multisite silicon neural probe with integrated flexible connector for interchangeable packaging
2021 | other
High-Performance and Industrially Viable Nanostructured SiO
Solar RRL
2021 | journal-article
Double-layer flexible neuronal probe with closely spaced electrodes for high-densityin-vivobrain recordings
2020 | preprint
A Smart Dental Prosthesis to Restore Dental Proprioceptivity
2020 35th Conference on Design of Circuits and Integrated Systems, DCIS 2020
2020 | conference-paper
An Active Implant to Restore Dental Proprioceptivity
Proceedings - Euromicro Conference on Digital System Design, DSD 2020
2020 | conference-paper
An Alternative Approach to Investigate V-Shaped Electrothermal Microactuators in Vacuum
Journal of Microelectromechanical Systems
2020 | journal-article
An efficient and deterministic photon management using deep subwavelength features
Nano Energy
2020 | journal-article
Design Optimization of a Lorentz Force, Amplitude Modulated, MEMS Space Magnetometer
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2020 | conference-paper
Dissolving microneedles for the delivery of peptides – Towards tolerance-inducing vaccines
International Journal of Pharmaceutics
2020 | journal-article
Efficient light extraction in subwavelength GaAs/AlGaAs nanopillars for nanoscale light-emitting devices
Optics Express
2020 | journal-article
Engineering of 2D transition metal carbides and nitrides MXenes for cancer therapeutics and diagnostics
Journal of Materials Chemistry B
2020 | journal-article
Erratum to: Conformal and continuous deposition of bifunctional cobalt phosphide layers on p-silicon nanowire arrays for improved solar hydrogen evolution (Nano Research, (2018), 11, 9, (4823-4835), 10.1007/s12274-018-2070-4)
Nano Research
2020 | journal-article
Fabrication and characterization of thin-film silicon resonators on 10 μm-thick polyimide substrates
Journal of Micromechanics and Microengineering
2020 | journal-article
Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined with Grayscale Lithography
Journal of Microelectromechanical Systems
2020 | journal-article
Facile synthesis and defect optimization of 2D-layered MoS
Scientific Reports
2020 | journal-article
Field-effect transistors made of graphene grown on recycled copper foils
Materials Chemistry and Physics
2020 | journal-article
Highly sensitive MEMS frequency modulated accelerometer with small footprint
Sensors and Actuators, A: Physical
2020 | journal-article
Industry 4.0: Real-time monitoring of an injection molding tool for smart predictive maintenance
IEEE International Conference on Emerging Technologies and Factory Automation, ETFA
2020 | conference-paper
Influence of Mechanical Stress in a Packaged Frequency-Modulated MEMS Accelerometer
INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
2020 | conference-paper
Opportunities for enhanced omnidirectional broadband absorption of the solar radiation using deep subwavelength structures
Nano Energy
2020 | journal-article
Organ-on-a-Chip: A Preclinical Microfluidic Platform for the Progress of Nanomedicine
Small
2020 | journal-article
Small-size MEMS Accelerometer Encapsulated in Vacuum Using Sigma-Delta Modulation
INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
2020 | conference-paper
Surface Texture Detection with a New Sub-mm Resolution Flexible Tactile Capacitive Sensor Array for Multimodal Artificial Finger
Journal of Microelectromechanical Systems
2020 | journal-article
A Perspective on Microneedle-Based Drug Delivery and Diagnostics in Paediatrics
Journal of Personalized Medicine
2019 | journal-article
Manipulation of Magnetic Beads with Thin Film Microelectromagnet Traps
Micromachines
2019 | journal-article
A morphological and electronic study of ultrathin rear passivated Cu(In,Ga)Se
Thin Solid Films
2019 | journal-article
Automated characterisation and analysis of large arrays of nanostructures fabricated at wafer scale
Precision Engineering
2019 | journal-article
Creative Approaches on Interactive Visualization and Characterization at the Nanoscale
2019 | book-chapter
Fast and efficient microfluidic cell filter for isolation of circulating tumor cells from unprocessed whole blood of colorectal cancer patients
Scientific Reports
2019 | journal-article
Fatigue lifetime prediction of arbitrarily-shaped MEMS structures made of polysilicon thin films
Microsystem Technologies
2019 | journal-article
Hybrid Rigid-Flexible Magnetoresistive Device Based on a Wafer Level Packaging Technology for Micrometric Proximity Measurements
IEEE Sensors Journal
2019 | journal-article
Small Size and Highly Sensitive Differential MEMS Accelerometer Based on Double-Ended Tuning Fork Resonators
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
2019 | conference-paper
Strong enhancement of light extraction efficiency in sub-wavelength AlGaAs/GaAs vertical-emitting nanopillars
Optics InfoBase Conference Papers
2019 | conference-paper
Strong enhancement of light extraction efficiency in sub-wavelength AlGaAs/GaAs vertical-emitting nanopillars
2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019
2019 | conference-paper
Sub-Micron Mems Accelerometer with Handle-Layer Patterning for Damping Enhancement Using Time Transduction
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
2019 | conference-paper
Thin-Film Silicon Resonators on Ultra-Flexible 10 Micrometer-Thick Polyimide Substrates
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
2019 | conference-paper
Resonant Accelerometer based on Double-Ended Tuning Fork and a Force Amplification Mechanism
2018 | conference-paper
Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork Resonator
Proceedings
2018 | journal-article
High Frequency FM MEMS Accelerometer Using Piezoresistive Resonators
Proceedings
2018 | journal-article
SU-8 Based Waveguide for Optrodes
Proceedings
2018 | journal-article
High-Resolution Seismocardiogram Acquisition and Analysis System
Sensors
2018 | journal-article
3D Magnetic Field Reconstruction Methodology Based on a Scanning Magnetoresistive Probe
Sensors
2018 | journal-article
Conformal and continuous deposition of bifunctional cobalt phosphide layers on p-silicon nanowire arrays for improved solar hydrogen evolution
Nano Research
2018 | journal-article
Digital platform for Sigma-Delta accelerometer assessment and test
Microsystem Technologies
2018 | journal-article
Efficient light trapping and broadband absorption of the solar spectrum in nanopillar arrays decorated with deep-subwavelength sidewall features
Nanoscale
2018 | journal-article
Highly efficient DNA extraction and purification from olive oil on a washable and reusable miniaturized device
Analytica Chimica Acta
2018 | journal-article
Highly-ordered silicon nanowire arrays for photoelectrochemical hydrogen evolution: An investigation on the effect of wire diameter, length and inter-wire spacing
Sustainable Energy and Fuels
2018 | journal-article
Insulator Materials for Interface Passivation of Cu(In,Ga)Se
IEEE Journal of Photovoltaics
2018 | journal-article
Ultra-small packaged micro-cooler for medical applications
2017 IEEE 19th Electronics Packaging Technology Conference, EPTC 2017
2018 | conference-paper
Challenges and trends in magnetic sensor integration with microfluidics for biomedical applications
Journal of Physics D: Applied Physics
2017 | journal-article
Flexible Magnetoresistive Sensors Designed for Conformal Integration
IEEE Transactions on Magnetics
2017 | journal-article
Microneedles with integrated magnetoresistive sensors: A precision tool in biomedical instrumentation
SAS 2017 - 2017 IEEE Sensors Applications Symposium, Proceedings
2017 | conference-paper
Novel magnetic readout for hybrid spintronic MEMS devices
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
2017 | conference-paper
On-Chip Magnetic Nanoparticle Manipulation and Trapping for Biomedical Applications
IEEE Transactions on Magnetics
2017 | journal-article
Towards high-resolution scanning magnetoresistance microscopy
2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
2017 | conference-paper
Ultra-Low Temperature FOWLP Process for the Embedding of Low Thermal Budget Sensors and Components Using SU-8 as Dielectric
Proceedings - Electronic Components and Technology Conference
2017 | conference-paper
Hybrid Integration of Magnetoresistive Sensors with MEMS as a Strategy to Detect Ultra-Low Magnetic Fields
Micromachines
2016 | journal-article
Analysis and Characterization of Thermal-Piezoresistive MEMS Resonators
Procedia Engineering
2016 | conference-paper
Digital platform for wafer-level MEMS testing and characterization using electrical response
Sensors (Switzerland)
2016 | journal-article
Embedded Platform for Generic High-order Sigma-delta Accelerometers Testing
Procedia Engineering
2016 | conference-paper
Full-gap tracking system for parallel plate electrostatic actuators using closed-loop control
Sensors and Actuators, A: Physical
2016 | journal-article
Implementing a strategy for on-chip detection of cell-free DNA fragments using GMR sensors: A translational application in cancer diagnostics using ALU elements
Analytical Methods
2016 | journal-article
Low-voltage, High-tuning Range MEMS Variable Capacitor Using Closed-loop Control
Procedia Engineering
2016 | conference-paper
Performance Comparison of Sigma-delta Modulator Architectures for MEMS Accelerometers Using a Fully-Digital Approach
Procedia Engineering
2016 | conference-paper
Amorphous oxygen-rich molybdenum oxysulfide Decorated p-type silicon microwire Arrays for efficient photoelectrochemical water reduction
Nano Energy
2015 | journal-article
Bending Effect on Magnetoresistive Silicon Probes
IEEE Transactions on Magnetics
2015 | journal-article
Bending effect on magnetoresistive silicon probes
2015 IEEE International Magnetics Conference, INTERMAG 2015
2015 | conference-paper
Bi-directional extended range parallel plate electrostatic actuator based on feedback linearization
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2015 | conference-paper
Design, fabrication and test of an integrated multi-microchannel heat sink for electronics cooling
Sensors and Actuators, A: Physical
2015 | journal-article
Embedded MEMS platform for structure test and characterization
Procedia Engineering
2015 | conference-paper
Fabrication and characterization of polymeric three-axis thermal accelerometers
Journal of Micromechanics and Microengineering
2015 | journal-article
Fabrication and mechanical characterization of flexible devices with sensors with magnetoresistance responses above 150%
2015 IEEE International Magnetics Conference, INTERMAG 2015
2015 | conference-paper
High-Resolution MEMS Inclinometer Based on Pull-In Voltage
Journal of Microelectromechanical Systems
2015 | journal-article
High-performance pull-in time accelerometer
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
2015 | conference-paper
Integration of Magnetoresistive Sensors with Atomic Force Microscopy Cantilevers for Scanning Magnetoresistance Microscopy Applications
IEEE Transactions on Magnetics
2015 | journal-article
Integration of magnetoresistive sensors with atomic force microscopy cantilevers for scanning magnetoresistance microscopy applications
2015 IEEE International Magnetics Conference, INTERMAG 2015
2015 | conference-paper
Real-Time Operation and Characterization of a High-Performance Time-Based Accelerometer
Journal of Microelectromechanical Systems
2015 | journal-article
Sub-micron gap in-plane micromechanical resonators based on low-temperature amorphous silicon thin-films on glass substrates
Journal of Micromechanics and Microengineering
2015 | journal-article
Full-gap tracking system for parallel-plate electrostatic microactuatores
Procedia Engineering
2014 | conference-paper
Piezoresistor sensor fabrication by direct laser writing on hydrogenated amorphous silicon
Journal of Management and Organization
2014 | journal-article
The use of polymeric technologies for functional 3D Microdevices
Procedia Engineering
2014 | conference-paper
Thermal compensated pull-in voltage MEMS inclinometers
Procedia Engineering
2014 | conference-paper
A fully integrated three-axis thermal accelerometer
Conference Record - IEEE Instrumentation and Measurement Technology Conference
2013 | conference-paper
A prediction scheme of the static fracture strength of MEMS structures based on the characterization of damage distribution on a processed surface
Journal of Micromechanics and Microengineering
2013 | journal-article
High resolution pull-in inclinometer
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
2013 | conference-paper
Integration of TMR sensors in silicon microneedles for magnetic measurements of neurons
IEEE Transactions on Magnetics
2013 | journal-article
Measuring brain activity with magnetoresistive sensors integrated in micromachined probe needles
Applied Physics A: Materials Science and Processing
2013 | journal-article
Sub-micron gap a-Si:H thin film Lamé-mode resonator processed at low temperature on a glass substrate
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
2013 | conference-paper
The effect of eccentricity in the position of UO
Progress in Nuclear Energy
2013 | journal-article
FIB preparation and SEM investigations for three-dimensional analysis of cell cultures on microneedle arrays
Scanning
2012 | journal-article
Identification of fatigue crack extension process in zero-tension cyclic stress test of polysilicon films
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2012 | conference-paper
Integration of magnetoresistive biochips on a CMOS circuit
IEEE Transactions on Magnetics
2012 | journal-article
Mechanical and piezoresistive properties of thin silicon films deposited by plasma-enhanced chemical vapor deposition and hot-wire chemical vapor deposition at low substrate temperatures
Journal of Applied Physics
2012 | journal-article
Micro-fabricated channel with ultra-thin yet ultra-strong windows enables electron microscopy under 4-bar pressure
Applied Physics Letters
2012 | journal-article
Statistical characterization of fatigue lifetime of polysilicon thin films
Sensors and Actuators, A: Physical
2012 | journal-article
Effect of humidity and temperature on the fatigue behavior of polysilicon thin film
Sensors and Actuators, A: Physical
2011 | journal-article
Estimation of the parameters determining strength and fatigue behaviors of arbitrarily-shaped polysilicon thin films
ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems, InterPACK 2011
2011 | conference-paper
Finite fatigue lifetime of silicon under inert environment
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2011 | conference-paper
Measurement of nanomicro out-of-plane and in-plane displacements of micromechanical components by using digital holography and speckle interferometry
Optical Engineering
2011 | journal-article
Nonlinear piezoresistance of silicon at large stresses
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2011 | conference-paper
Study of the piezoresistivity of doped nanocrystalline silicon thin films
Journal of Applied Physics
2011 | journal-article
A novel fatigue test with ramping stress amplitude to evaluate fatigue behavior of polysilicon thin films
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2010 | conference-paper
A study of prediction of static fracture strength of MEMS structure for strength design scheme
Procedia Engineering
2010 | conference-paper
Accuracy of the fatigue lifetime of polysilicon predicted from its strength distribution
Materials Research Society Symposium Proceedings
2010 | conference-paper
Characterization of ultrathin membranes to enable TEM observation of gas reactions at high pressures
ASME International Mechanical Engineering Congress and Exposition, Proceedings
2010 | conference-paper
Design of experiment characterization of microneedle fabrication processes based on dry silicon etching
Journal of Micromechanics and Microengineering
2010 | journal-article
Development of reference standards for the calibration of optical systems used in the measurement of microcomponents
Strain
2010 | journal-article
Low-frequency two-dimensional resonators for vibrational micro energy harvesting
Journal of Micromechanics and Microengineering
2010 | journal-article
Mechanical properties of thin silicon films deposited at low temperatures by PECVD
Journal of Micromechanics and Microengineering
2010 | journal-article
Nonlinear piezoresistance of silicon
Proceedings of IEEE Sensors
2010 | conference-paper
Out-of-plane electrostatic microactuators with tunable stiffness
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2010 | conference-paper
A 2D electret-based resonant micro energy harvester
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2009 | conference-paper
Calibration of optical systems for the measurement of microcomponents
Optics and Lasers in Engineering
2009 | journal-article
Development of calibration standards for the optical measurement of in-plane displacements of micromechanical components
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2009 | conference-paper
Evaluation of the mechanical properties of aluminum thin films as a function of strain rate using the wafer-scale microtensile technique
Materials Research Society Symposium Proceedings
2009 | conference-paper
Highly efficient extraction of mechanical and linear and quadratic piezoresistive properties of poly-Si films using wafer-scale microtensile testing
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2009 | conference-paper
Hollow microneedle electrode arrays for intracellular recording applications
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2009 | conference-paper
MEMS calibration standards for the optical measurement of displacements
Fringe 2009 - 6th International Workshop on Advanced Optical Metrology
2009 | conference-paper
Measurement of in-plane deformations of microsystems by digital holography and speckle interferometry
Chinese Optics Letters
2009 | journal-article
Mechanical characterization of CMOS metal layers
TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
2009 | conference-paper
Prediction of strength and fatigue lifetime of MEMS structures with arbitrary shapes
TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
2009 | conference-paper
Wafer-scale microtensile testing of thin films
Journal of Microelectromechanical Systems
2009 | journal-article
Characterization of the charging and long-term performance of cytop electret layers for MEMS applications
Materials Research Society Symposium Proceedings
2008 | conference-paper
Fracture properties of LPCVD silicon nitride and thermally grown silicon oxide thin films from the load-deflection of long Si
Journal of Microelectromechanical Systems
2008 | journal-article
High-throughput wafer-scale microtensile testing of thin films
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2008 | conference-paper
Intracellular potential measurements of adherently growing cells using micro-needle arrays
12th International Conference on Miniaturized Systems for Chemistry and Life Sciences - The Proceedings of MicroTAS 2008 Conference
2008 | conference-paper
Mechanical properties and reliability of amorphous vs. poly crystalline silicon thin films
Materials Research Society Symposium Proceedings
2008 | conference-paper
Microneedle arrays for intracellular recording applications
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2008 | conference-paper
Modeling and improvement of a metallization system subjected to fast temperature cycle stress
EuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems
2008 | conference-paper
Prediction of fatigue lifetime based on static strength and crack extension law - Fatigue test of MEMS materials becomes unnecessary
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2008 | conference-paper
Reliability of MEMS materials: Mechanical characterization of thin-films using the wafer scale bulge test and improved microtenslle techniques
Materials Research Society Symposium Proceedings
2008 | conference-paper
Seamless interpretation of the strength and fatigue lifetime of polycrystalline silicon thin films
Journal of Micromechanics and Microengineering
2008 | journal-article
Systematic characterization of DRIE-based fabrication process of silicon microneedles
Materials Research Society Symposium Proceedings
2008 | conference-paper
Advanced silicon microstructures, sensors, and systems
IEEJ Transactions on Electrical and Electronic Engineering
2007 | journal-article
Comparison of improved bulge and microtensile techniques for mechanical thin film characterization -application to polysilicon
TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
2007 | conference-paper
Electrostatic transducers for micro energy harvesting based on SOI technology
TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
2007 | conference-paper
Mechanical characterization of silicon nitride thin-films using microtensile specimens with integrated 2D diffraction gratings
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2007 | conference-paper
Mechanical characterization of thin-film composites using the load-deflection response of multilayer membranes - Elastic and fracture properties
Materials Research Society Symposium Proceedings
2006 | conference-paper
Electrostatic microresonators from doped hydrogenated amorphous and nanocrystalline silicon thin films
Journal of Microelectromechanical Systems
2005 | journal-article
Electrostatically actuated polymer microresonators
Applied Physics Letters
2005 | journal-article
Electrostatically actuated thin-film amorphous silicon microbridge resonators
Journal of Applied Physics
2005 | journal-article
Thin film silicon microbridges for DNA detection
Materials Research Society Symposium Proceedings
2005 | conference-paper
Thin-film paddle microresonators with high quality factors fabricated at temperatures below 110°C
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2005 | conference-paper
Amorphous silicon electrostatic microresonators with high quality factors
Applied Physics Letters
2004 | journal-article
High-Q thin-film silicon resonators processed at temperatures below 110°C on glass and plastic substrates
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2004 | conference-paper
MEMS microresonators based on nanocrystalline silicon
Materials Research Society Symposium Proceedings
2004 | conference-paper
Dissipation mechanisms in thin-film silicon microresonators on glass substrates
Materials Research Society Symposium - Proceedings
2003 | conference-paper
Electrostatic actuation of thin-film microelectromechanical structures
Journal of Applied Physics
2003 | journal-article
Integrated magnetic sensing of electrostatically actuated thin-film microbridges
Journal of Microelectromechanical Systems
2003 | journal-article
Low-temperature thin-film silicon MEMS
Thin Solid Films
2003 | journal-article
Performance of Thin-Film Silicon MEMS Resonators in Vacuum
Materials Research Society Symposium - Proceedings
2003 | conference-paper
Thin-film electrostatic actuators on flexible plastic substrates
Materials Research Society Symposium - Proceedings
2003 | conference-paper
Integrated magnetic sensing of electrostatically actuated thin-film microbridges
Materials Research Society Symposium - Proceedings
2002 | conference-paper
MEMS microbridge deflection monitoring using integrated spin valve sensors and micromagnets
Digests of the Intermag Conference
2002 | conference-paper
MEMS microbridge deflection monitoring using integrated spin valve sensors and micromagnets
INTERMAG Europe 2002 - IEEE International Magnetics Conference
2002 | conference-paper
MEMS microbridge vibration monitoring using spin-valve sensors
IEEE Transactions on Magnetics
2002 | journal-article
Microelectromechanical system microbridge deflection monitoring using integrated spin valve sensors and micromagnets
Journal of Applied Physics
2002 | journal-article
Thermal actuation of thin film microelectromechanical structures
Journal of Non-Crystalline Solids
2002 | journal-article
Thin film microelectromechanical systems
Materials Research Society Symposium - Proceedings
2002 | conference-paper
Amorphous and microcrystalline silicon deposited by hot-wire chemical vapor deposition at low substrate temperatures: Application to devices and thin-film microelectromechanical systems
Thin Solid Films
2001 | journal-article
Electromechanical properties of amorphous and microcrystalline silicon micromachined structures
Materials Research Society Symposium - Proceedings
2001 | conference-paper
Thin-film microelectromechanical devices on large-area substrates
Solid State Phenomena
2001 | book




