Algoritmi | User | Inês Sofia Moreira Garcia

Inês Sofia Moreira Garcia

Inês Sofia Moreira Garcia

At LASI

Other with MSc

Member of the CALG R&D Unit

Academic Degree

MSc

Current Position

Other at Escola de Engenharia da Universidade do Minho

Personal Webpage

Personal Email

ines.garcia@inl.int

Orcid

0000-0002-4605-6961

Researcher ID

FCT Public Key

J825541n1vy7

Ciência ID

Google Scholar

Assessing tolerances in direct write laser grayscale lithography and reactive ion etching pattern transfer for fabrication of 2.5D Si master molds

Micro and Nano Engineering

2023 | journal-article

Microfabrication of double proof-mass SOI-based matryoshka-like structures for 3-axis MEMS accelerometers

Micro and Nano Engineering

2023 | journal-article

Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography

Micro and Nano Engineering

2022 | journal-article

Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography

Journal of Microelectromechanical Systems

2020 | journal-article

Autonomous 4DOF Robotic Manipulator Prototype for Industrial Environment and Human Cooperation

19th IEEE International Conference on Autonomous Robot Systems and Competitions, ICARSC 2019

2019 | conference-paper

Development of an anthropomorphic mobile manipulator with human, machine and environment interaction

FME Transactions

2019 | journal-article

Q-Leaming for Autonomous Mobile Robot Obstacle Avoidance

19th IEEE International Conference on Autonomous Robot Systems and Competitions, ICARSC 2019

2019 | conference-paper

Sub-Micron Mems Accelerometer with Handle-Layer Patterning for Damping Enhancement Using Time Transduction

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

2019 | conference-paper

Development of a prototype robot for transportation within industrial environments

2017 IEEE International Conference on Autonomous Robot Systems and Competitions, ICARSC 2017

2017 | conference-paper

Assessing tolerances in direct write laser grayscale lithography and reactive ion etching pattern transfer for fabrication of 2.5D Si master molds

Micro and Nano Engineering

2023 | journal-article

Microfabrication of double proof-mass SOI-based matryoshka-like structures for 3-axis MEMS accelerometers

Micro and Nano Engineering

2023 | journal-article

Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography

Micro and Nano Engineering

2022 | journal-article

Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography

Journal of Microelectromechanical Systems

2020 | journal-article

Autonomous 4DOF Robotic Manipulator Prototype for Industrial Environment and Human Cooperation

19th IEEE International Conference on Autonomous Robot Systems and Competitions, ICARSC 2019

2019 | conference-paper

Development of an anthropomorphic mobile manipulator with human, machine and environment interaction

FME Transactions

2019 | journal-article

Q-Leaming for Autonomous Mobile Robot Obstacle Avoidance

19th IEEE International Conference on Autonomous Robot Systems and Competitions, ICARSC 2019

2019 | conference-paper

Sub-Micron Mems Accelerometer with Handle-Layer Patterning for Damping Enhancement Using Time Transduction

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

2019 | conference-paper

Development of a prototype robot for transportation within industrial environments

2017 IEEE International Conference on Autonomous Robot Systems and Competitions, ICARSC 2017

2017 | conference-paper

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