Algoritmi | User | Inês Sofia Moreira Garcia
Inês Sofia Moreira Garcia
Inês Sofia Moreira Garcia
At LASI
Other with MSc
Member of the CALG R&D Unit
Academic Degree
MSc
Current Position
Other at Escola de Engenharia da Universidade do Minho
Personal Webpage
Personal Email
ines.garcia@inl.intOrcid
0000-0002-4605-6961Researcher ID
FCT Public Key
J825541n1vy7
Ciência ID
Google Scholar
Publications (19)
All-Silicon Multispot 2-D Beam Steering MEMS Mirror
IEEE Sensors Journal
2026 | journal-article
MEMS accelerometer for satellite gravimetry
Advances in Space Research
2025 | journal-article
Highly Tunable, Low-g MEMS Inertial Switch for Power-Efficient IoT Wake-Up Functions
IEEE Sensors Journal
2025 | journal-article
Through Silicon MEMS Inspection with a Near-Infrared Laser Scanning Setup
Sensors
2025 | journal-article
High Sensitivity and Wide Bandwidth in Multi-Mass MEMS Accelerometers
2025 | conference-paper
Near Zero-Power Omnidirectional, In-Plane Pull-In-Based MEMS Switch
2025 | conference-paper
Fabrication and Electrical Characterization of Low-Temperature Polysilicon Films for Sensor Applications
Micromachines
2024 | journal-article
Small Footprint Temperature Sensing NFC Tag
2024 | conference-paper
High-Frequency Grating-Based Microelectromechanical Systems Actuator
2024 | conference-paper
Electrostatic Microelectromechanical System Speaker Array with Out-of-Plane Piston Displacement and Simplified Microfabrication
2024 | conference-paper
Assessing tolerances in direct write laser grayscale lithography and reactive ion etching pattern transfer for fabrication of 2.5D Si master molds
Micro and Nano Engineering
2023 | journal-article
Microfabrication of double proof-mass SOI-based matryoshka-like structures for 3-axis MEMS accelerometers
Micro and Nano Engineering
2023 | journal-article
Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography
Micro and Nano Engineering
2022 | journal-article
Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography
Journal of Microelectromechanical Systems
2020 | journal-article
Autonomous 4DOF Robotic Manipulator Prototype for Industrial Environment and Human Cooperation
19th IEEE International Conference on Autonomous Robot Systems and Competitions, ICARSC 2019
2019 | conference-paper
Development of an anthropomorphic mobile manipulator with human, machine and environment interaction
FME Transactions
2019 | journal-article
Q-Leaming for Autonomous Mobile Robot Obstacle Avoidance
19th IEEE International Conference on Autonomous Robot Systems and Competitions, ICARSC 2019
2019 | conference-paper
Sub-Micron Mems Accelerometer with Handle-Layer Patterning for Damping Enhancement Using Time Transduction
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
2019 | conference-paper
Development of a prototype robot for transportation within industrial environments
2017 IEEE International Conference on Autonomous Robot Systems and Competitions, ICARSC 2017
2017 | conference-paper
All-Silicon Multispot 2-D Beam Steering MEMS Mirror
IEEE Sensors Journal
2026 | journal-article
MEMS accelerometer for satellite gravimetry
Advances in Space Research
2025 | journal-article
Highly Tunable, Low-g MEMS Inertial Switch for Power-Efficient IoT Wake-Up Functions
IEEE Sensors Journal
2025 | journal-article
Through Silicon MEMS Inspection with a Near-Infrared Laser Scanning Setup
Sensors
2025 | journal-article
High Sensitivity and Wide Bandwidth in Multi-Mass MEMS Accelerometers
2025 | conference-paper
Near Zero-Power Omnidirectional, In-Plane Pull-In-Based MEMS Switch
2025 | conference-paper
Fabrication and Electrical Characterization of Low-Temperature Polysilicon Films for Sensor Applications
Micromachines
2024 | journal-article
Small Footprint Temperature Sensing NFC Tag
2024 | conference-paper
High-Frequency Grating-Based Microelectromechanical Systems Actuator
2024 | conference-paper
Electrostatic Microelectromechanical System Speaker Array with Out-of-Plane Piston Displacement and Simplified Microfabrication
2024 | conference-paper
Assessing tolerances in direct write laser grayscale lithography and reactive ion etching pattern transfer for fabrication of 2.5D Si master molds
Micro and Nano Engineering
2023 | journal-article
Microfabrication of double proof-mass SOI-based matryoshka-like structures for 3-axis MEMS accelerometers
Micro and Nano Engineering
2023 | journal-article
Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography
Micro and Nano Engineering
2022 | journal-article
Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography
Journal of Microelectromechanical Systems
2020 | journal-article
Autonomous 4DOF Robotic Manipulator Prototype for Industrial Environment and Human Cooperation
19th IEEE International Conference on Autonomous Robot Systems and Competitions, ICARSC 2019
2019 | conference-paper
Development of an anthropomorphic mobile manipulator with human, machine and environment interaction
FME Transactions
2019 | journal-article
Q-Leaming for Autonomous Mobile Robot Obstacle Avoidance
19th IEEE International Conference on Autonomous Robot Systems and Competitions, ICARSC 2019
2019 | conference-paper
Sub-Micron Mems Accelerometer with Handle-Layer Patterning for Damping Enhancement Using Time Transduction
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
2019 | conference-paper
Development of a prototype robot for transportation within industrial environments
2017 IEEE International Conference on Autonomous Robot Systems and Competitions, ICARSC 2017
2017 | conference-paper




